ȯ̹۵|ASMLܶԹ̻̻ɽ
2023-11-10 17:56:54 Դ ͬ˳iNews
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1110գ°֤ȯһƪҵо棬ָASMLܶԹ̻̻ɽ
£
̻ṹӣһǼɵ·оƬиӡؼĹղ裬̻ǹ̼Ĺؼ豸̻ɹԴͶӰﾵеƵϵͳɡASML̻Ϊģ飺ѧֺ;Բģ飬ѧԲƽ̨ģΪӡ߶˵EUV̻ʮ㲿ȫڶӦ̣ʹݼߡ
ASMLǰ뵼̻ͷƽһNAEUV̻зASMLĿǰĹ̻Ʒອi-lineKrFArFEUVȶֹԴASMLĿǰASMLռEUV̼ΪASMLͨڽûʽϵͳTWINSCAN˫̨ԼEUVϵзΪȫ̻ͷһ̻зASMLĿǰоEUVƽֵ̨NA0.330.55NAӶһСֱ̻ʣʵ2nmƳ̵졣ASMLԤƸNA豸зͽ2023׳ԤƵ2025꽫ڿͻȫ
SSMB-EUVԴܳΪEUVԴһ֤ڻڵEUVԴʽһͻ,˻۵ĸԴҵҰ,ڳֱĸƵFELԼSSMB̬ȡSSMBҲʵִ1kWEUV,ۺģСΪһԴԭSSMBԭʵ֤Ѿʵ,Ҫвҵز컯Ŀǰ廪ѧѾںӱ۰SSMBĿѡַƽ蹤
̻ӦܷϡĿǰEUVԴҲоȡһչ2017꣬йѧԺѧܻео¼Ƴġ̹ؼоù02רգӶƽҹEUVļз20234£йѧԺԺʿ״УιEUVԴ⣬Թ̻ĵĹԴѧԼԲƽ̨ģ飬ҹѾҵЩģֲȡһչ
Ͷʽ飺ע̻ҵ1ԴϵͳƼ002222ȣ2ѧϵͳïѧƼ603005ƼھƼӣ300456ȣ3Բƽ̨ϵͳչ磨002338մά300331ȣ4㲿ܡӦģ300260ȡ
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õϢԴ֤ݵʵʱԡȷԺԣݽοݴ˽ףԵ
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